Montana Microfabrication Facility
The Montana Microfabrication Facility (MMF) is a shared use cleanroom facility at Montana State University. Most of the devices developed as part of Prof. Dickensheets' research were fabricated in the MMF.
Capabilities of the MMF include thin films deposition (sputtered, evaporated, thermally grown, spincast), lithography (contact optical lithography and e-beam lithography) and etching (wet processing, plasma and reactive ion etching).
Professor Dickensheets is the Director of the MMF, which is managed by Dr. Phil Himmer. For more information please visit the MMF webpage.