EE 407 - Introduction to Microfabrication
This course provides an introduction to clean room safety protocol and micro fabrication. Lectures will introduce micro fabrication methods, models and equipment. Laboratories will perform the steps to produce and characterize a metal-oxide-semiconductor transistor.
Introduction to Microelectroinc Fabrication 2e, (Required)
by Richard C. Jaeger
Prentice Hall, 2002