EE 505 - MEMS

Course Description

This course introduces students to microfabrication of electrical and mechanical devices. The theory of various mechanical transducers and physical sensors including optical MEMS, RF MEMS, and Bio/Chemical MEMS are discussed.

Textbook

Practical MEMS, (Required)
by Ville Kaajakari
Small Gear Publishing, 2009

Pre-Requisites

EE409 or equivalent